Single MEVVA ion source diffusion coating composite treating process

This invention publishes a kind of seeping-injecting-plating compound treatment for single MEVVA ion source. And the technical problem this invention will solve is the low efficiency of filling ion. Firstly, after the work-piece is put onto the work-piece shelf, the air in the vacuum furnace should...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MA SHENGGE, FEI QINYONG, GENG MAN, ZHANG DEYUAN, ZHAO HAOMIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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