Microstructures and methods of fabrication thereof

Microstructures and methods of fabricating microstructures are disclosed. One exemplary microstructure, among others, includes a substrate, an overcoat layer disposed upon the substrate, an air-region within at least a portion of the overcoat layer, and a framing material layer engaging at least a p...

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Bibliographische Detailangaben
1. Verfasser: ALLEN SUE ELLEN BIDSTRUP,JAYACHANDRAN JOSEPH PAUL,KOHL PAUL A
Format: Patent
Sprache:eng
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Zusammenfassung:Microstructures and methods of fabricating microstructures are disclosed. One exemplary microstructure, among others, includes a substrate, an overcoat layer disposed upon the substrate, an air-region within at least a portion of the overcoat layer, and a framing material layer engaging at least a portion of the air-region on the inside of the framing material layer and engaging the overcoat layer on the outside of the framing material layer.