Fluid injection nozzle

A fluid injection nozzle for treating a substrate includes a first plate having a first tip, and a second plate having a second tip, the second tip being coupled to the first plate by a fastener. The first and second plates define a fluid channel, and the first and second tips have lengths different...

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1. Verfasser: HEO KYOUNG-HEON
Format: Patent
Sprache:eng
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Zusammenfassung:A fluid injection nozzle for treating a substrate includes a first plate having a first tip, and a second plate having a second tip, the second tip being coupled to the first plate by a fastener. The first and second plates define a fluid channel, and the first and second tips have lengths different from each other.