CH676378

A turbomolecular vacuum pump comprises a hollow stator (1) in which is mounted a hollow rotor (3) between which are located channels (3, 4) of the turbomolecular and molecular gas-pumping stages connected to the atmosphere through additional and main dynamic sealing channels (34, 36) formed by groov...

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Bibliographische Detailangaben
Hauptverfasser: SHARSHIN, SERGEI NIKOLAEVICH, SHOLOKHOV, VALERY BORISOVICH, SERGEEV, VLADIMIR PAVLOVICH, VIKHREV, VLADIMIR ILIICH
Format: Patent
Sprache:ger
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Beschreibung
Zusammenfassung:A turbomolecular vacuum pump comprises a hollow stator (1) in which is mounted a hollow rotor (3) between which are located channels (3, 4) of the turbomolecular and molecular gas-pumping stages connected to the atmosphere through additional and main dynamic sealing channels (34, 36) formed by grooves made on areas (35, 37) of the internal surface of the rotor (2) and by the external surface of the shaft (14) of the rotor (2) shaped as a multiple-thread having a rectangular profile, as well as by the surfaces of the rotor (2) and of a bearing (16), which face, respectively, the areas (37, 35), the bearing (16) being located inside the hollow rotor (2) in which is mounted one end of the shaft (14) of the rotor (2).