Installation for depositing a coating onto substrates

The installation for depositing a coating onto substrates comprises a chamber (2) provided for receiving the substrates and at least one target formed from a constituent material of the coating to be deposited, means for establishing within the chamber a controlled atmosphere and means for controlli...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VOUMARD, MARTIAL, BERGMANN, ERICH
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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