Installation for depositing a coating onto substrates
The installation for depositing a coating onto substrates comprises a chamber (2) provided for receiving the substrates and at least one target formed from a constituent material of the coating to be deposited, means for establishing within the chamber a controlled atmosphere and means for controlli...
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| Format: | Patent |
| Sprache: | eng ; fre |
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| Zusammenfassung: | The installation for depositing a coating onto substrates comprises a chamber (2) provided for receiving the substrates and at least one target formed from a constituent material of the coating to be deposited, means for establishing within the chamber a controlled atmosphere and means for controlling the sputtering of the target and the formation of the coating on the substrates. The chamber (2) is pivotally mounted so as to rotate about a horizontal axis (3) relative to the frame (1) of the installation, and it includes at least one removable wall (5) intended to carry the substrates. |
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