MULTICELL OR MULTIARRAY PLASMA AND METHOD FOR SURFACE TREATMENT USING THE SAME

Plasma device (1) comprising at least two plasma cells (Cx), and a command unit (2), wherein the first and the second electrodes of a given plasma cell are independent from the corresponding first and second electrodes of the contiguous plasma cells. The electrodes of contiguous plasma cells are ind...

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Bibliographische Detailangaben
Hauptverfasser:	ELLERT, CHRISTOPH, BIRCHER, FRITZ, MARTINET, DAVID, FILLIGER, SEBASTIAN, GERMANIER, ALAIN, GUGLER, GILBERT
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Plasma device (1) comprising at least two plasma cells (Cx), and a command unit (2), wherein the first and the second electrodes of a given plasma cell are independent from the corresponding first and second electrodes of the contiguous plasma cells. The electrodes of contiguous plasma cells are independently connected to the command unit. The command unit comprises a high voltage generator and a radiofrequency generator which are mutually protected by a filtering element. La présente invention concerne un dispositif à plasma (1) comprenant au moins deux cellules de plasma (Cx) et une unité de commande (2), les première et seconde électrodes d'une cellule de plasma donnée étant indépendantes des première et seconde électrodes correspondantes des cellules à plasma contiguës. Les électrodes de cellules de plasma contiguës sont connectées indépendamment à l'unité de commande. L'unité de commande comprend un générateur haute tension et un générateur radiofréquence qui sont mutuellement protégés par un élément filtrant.