APPARATUS AND METHOD FOR INSPECTION OF A FILM ON A SUBSTRATE

Methods of and apparatus for inspecting composite layers of a first material formed on a second material are provided including providing an illumination source, illuminating at least a portion of the composite at the layer, receiving light reflected from the sample, determining a spectral response...

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Bibliographische Detailangaben
Hauptverfasser:	RIDER, KEITH B, HAVENER, AARON C, MOHR, THOMAS C, JOGERST, JAMES D
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CALCULATING COLORIMETRY COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	Methods of and apparatus for inspecting composite layers of a first material formed on a second material are provided including providing an illumination source, illuminating at least a portion of the composite at the layer, receiving light reflected from the sample, determining a spectral response from the received light, and comparing the received spectral response to an expected spectral response. L'invention concerne des procédés et un appareil d'inspection des couches composites d'un premier matériau formé sur un second matériau, consistant à utiliser une source d'éclairage, à éclairer au moins une partie du composite au niveau de la couche, à recevoir la lumière réfléchie par l'échantillon, à déterminer une réponse spectrale à partir de la lumière reçue et à comparer la réponse spectrale reçue à une réponse spectrale attendue.