MEMS VIBRATING RING RESONATOR WITH DEFORMABLE INNER RING-SHAPED SPRING SUPPORTS

MEMS VIBRATING RING RESONATOR WITH DEFORMABLE INNER RING-SHAPED SPRING SUPPORTS

A Microelectromechanical systems (MEMS) based ring resonator includes an outer ring which is supported in resilient deformable movement relative to one or more peripherally disposed electrodes by a symmetrically positioned array of radially extending inner spring supports. The inner spring supports...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TING, DAVID S.K, KHAN, IMRAN, AHAMED, MOHAMMED JALAL
Format: Patent
Sprache:eng ; fre
Schlagworte:
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
NAVIGATION
PERFORMING OPERATIONS
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:A Microelectromechanical systems (MEMS) based ring resonator includes an outer ring which is supported in resilient deformable movement relative to one or more peripherally disposed electrodes by a symmetrically positioned array of radially extending inner spring supports. The inner spring supports extend radially from a central anchor post or support to the inner circumferential edge of the outer ring. The inner spring supports are configured to deformation or regulate movement in outer ring driving and sensing modes.