METHODS FOR CONFIRMING CHARGED-PARTICLE GENERATION IN AN INSTRUMENT, AND RELATED INSTRUMENTS

Methods for confirming charged-particle generation in an instrument are provided. A method to confirm charged-particle generation in an instrument includes providing electrical connections to a charged-particle optics system of the instrument while the charged-particle optics system is in a chamber....

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Bibliographische Detailangaben
1. Verfasser: VANGORDON, JAMES ARTHUR
Format: Patent
Sprache:eng ; fre
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