SHAPE MEASUREMENT SYSTEM, PROBE TIP UNIT, AND SHAPE MEASUREMENT METHOD

Provided is a shape measurement system in order to perform three-dimensional measurement corresponding to a measurement object having various shapes, which includes a measurement probe, a probe tip unit, and a calculation unit. The probe tip unit includes an optical element that is configured to irr...

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Bibliographische Detailangaben
Hauptverfasser: HARIYAMA, TATSUO, MARUNO, KENJI, TANIGUCHI, ATSUSHI, WATANABE, MASAHIRO
Format: Patent
Sprache:eng ; fre
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Beschreibung
Zusammenfassung:Provided is a shape measurement system in order to perform three-dimensional measurement corresponding to a measurement object having various shapes, which includes a measurement probe, a probe tip unit, and a calculation unit. The probe tip unit includes an optical element that is configured to irradiate an object with measurement light, a fixing mechanism that is configured to fix to the measurement probe so as to be detachable and replaceable, and a cylindrical unit that is configured to lock the optical element and is provided with the fixing mechanism.