PROCESS FOR PRODUCING FLEXIBLE ORGANIC-INORGANIC LAMINATES

The present invention is in the field of processes for producing flexible organic-inorganic laminates as well as barrier films comprising flexible organic-inorganic laminates by atomic layer deposition. In particular the present invention relates to a process for producing a laminate comprising more...

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Hauptverfasser: SUNG, MYUNG MO, KLOTZ, STEPHAN, LOFFLER, DANIEL, AHLF, MARAIKE, EICKEMEYER, FELIX, FRANK, JURGEN, YOON, KWAN HYUCK
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creator SUNG, MYUNG MO
KLOTZ, STEPHAN
LOFFLER, DANIEL
AHLF, MARAIKE
EICKEMEYER, FELIX
FRANK, JURGEN
YOON, KWAN HYUCK
description The present invention is in the field of processes for producing flexible organic-inorganic laminates as well as barrier films comprising flexible organic-inorganic laminates by atomic layer deposition. In particular the present invention relates to a process for producing a laminate comprising more than once the sequence comprising: (a) depositing an inorganic layer by performing 4 to 150 cycles of an atomic layer deposition process, and (b) depositing an organic layer comprising sulfur by a molecular layer deposition process. La présente invention concerne le domaine des procédés de production de stratifiés organiques-inorganiques flexibles ainsi que des films de barrière comprenant des stratifiés organiques-inorganiques flexibles par dépôt de couche atomique. En particulier, la présente invention concerne un procédé de production d'un stratifié comprenant plus d'une fois la séquence comprenant : (a) le dépôt d'une couche inorganique en effectuant 4 à 150 cycles d'un procédé de dépôt de couche atomique, et (b) le dépôt d'une couche organique comprenant du soufre par un procédé de dépôt de couche moléculaire.
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subjects LAYERED PRODUCTS
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
PERFORMING OPERATIONS
TRANSPORTING
title PROCESS FOR PRODUCING FLEXIBLE ORGANIC-INORGANIC LAMINATES
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