TERAHERTZ-WAVE DETECTOR

A terahertz-wave detector having a thermal separation structure in which a temperature detection unit 14 including a bolometer thin film 7 connected to electrode wiring 9 is supported so as to be lifted above a substrate 2 by a support part 13 including the electrode wiring 9 connected to a reading...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KURASHINA, SEIJI, MIYOSHI, MASARU
Format: Patent
Sprache:eng ; fre
Schlagworte:
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