TERAHERTZ-WAVE DETECTOR
A terahertz-wave detector having a thermal separation structure in which a temperature detection unit 14 including a bolometer thin film 7 connected to electrode wiring 9 is supported so as to be lifted above a substrate 2 by a support part 13 including the electrode wiring 9 connected to a reading...
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Format: | Patent |
Sprache: | eng ; fre |
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