HIGH DEFINITION HEATER SYSTEM HAVING A FLUID MEDIUM

An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two- phase fluid provides at least one of heating and cooling to t...

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Bibliographische Detailangaben
Hauptverfasser:	SMITH, KEVIN ROBERT, STEINHAUSER, LOUIS P, ZHANG, SANHONG, PTASIENSKI, KEVIN, SWANSON, CAL THOMAS, DERLER, RAY ALAN, NOSRATI, MOHAMMAD, SCHMIDT, PHILIP STEVEN, GRIMARD, DENNIS STANLEY, LINDLEY, JACOB ROBERT, BOLDT, ALLEN NORMAN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two- phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer.