SILICON CARBIDE SEMICONDUCTOR DEVICE WITH A GATE ELECTRODE

According to one embodiment, a semiconductor device has a semiconductor substrate comprising silicon carbide with a gate electrode disposed on a portion of the substrate on a first surface with, a drain electrode disposed on a second surface of the substrate. There is a dielectric layer disposed on...

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Hauptverfasser: LILIENFELD, DAVID ALAN, MATOCHA, KEVIN SEAN, FRONHEISER, JODY ALAN, MICHAEL, JOSEPH DARRYL, HAWKINS, WILLIAM GREGG, ARTHUR, STEPHEN DALEY, JOHNSON, TAMMY LYNN
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creator LILIENFELD, DAVID ALAN
MATOCHA, KEVIN SEAN
FRONHEISER, JODY ALAN
MICHAEL, JOSEPH DARRYL
HAWKINS, WILLIAM GREGG
ARTHUR, STEPHEN DALEY
JOHNSON, TAMMY LYNN
description According to one embodiment, a semiconductor device has a semiconductor substrate comprising silicon carbide with a gate electrode disposed on a portion of the substrate on a first surface with, a drain electrode disposed on a second surface of the substrate. There is a dielectric layer disposed on the gate electrode and a remedial layer disposed on, within or below the dielectric layer, wherein the remedial layer is configured to mitigate negative bias temperature instability maintaining a change in threshold voltage of less than about 1 volt. A source electrode is disposed on the remedial layer, wherein the source electrode is electrically coupled to a contact region of the semiconductor substrate.
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There is a dielectric layer disposed on the gate electrode and a remedial layer disposed on, within or below the dielectric layer, wherein the remedial layer is configured to mitigate negative bias temperature instability maintaining a change in threshold voltage of less than about 1 volt. A source electrode is disposed on the remedial layer, wherein the source electrode is electrically coupled to a contact region of the semiconductor substrate.</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title SILICON CARBIDE SEMICONDUCTOR DEVICE WITH A GATE ELECTRODE
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