METHOD AND APPARATUS FOR THE COATING AND FOR THE SURFACE TREATMENT OF SUBSTRATES BY MEANS OF A PLASMA BEAM

For the coating and for the surface treatment of substrates by means of a plasma beam a working chamber (2) with a plasma torch (4) is made available, a plasma beam (5) is produced in that a plasma gas is directed through the plasma torch (4) and is heated in the same by means of electrical gas disc...

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Bibliographische Detailangaben
Hauptverfasser:	REFKE, ARNO, HOLLENSTEIN, CHRISTOPH
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	For the coating and for the surface treatment of substrates by means of a plasma beam a working chamber (2) with a plasma torch (4) is made available, a plasma beam (5) is produced in that a plasma gas is directed through the plasma torch (4) and is heated in the same by means of electrical gas discharge, electromagnetic induction or microwaves, and the plasma beam (5) is directed onto a substrate (3) introduced into the working chamber, wherein the plasma torch (4) which is made available has a power for the thermal plasma spraying of solid material particles. During the coating and/or the surface treatment, the pressure in the working chamber (2) amounts to between 0.01 and 10 mbar, and at least one reactive component in liquid or gaseous form is injected into the plasma bea m (5) in order to coat the surface of a substrate (3) or to treat it.