VIBRATION CONTROL MASS BODY

Provided is a vibration control mass body, as a mass body used for controlling with a high accuracy a vibration associated with high-speed movement of a movable body such as a stage, which is large-sized and to which a complicated shape can be imparted. The vibration control mass body (100) includes...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KIKUHARA, SHINJI, UENISHI, NOBORU, INOUE, HITOSHI, UMEMOTO, SATOSHI
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ALLOYS BASIC ELECTRIC ELEMENTS BLASTING CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS FERROUS OR NON-FERROUS ALLOYS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MEANS FOR DAMPING VIBRATION MECHANICAL ENGINEERING METALLURGY SEMICONDUCTOR DEVICES SHOCK-ABSORBERS SPRINGS THERMAL INSULATION IN GENERAL TREATMENT OF ALLOYS OR NON-FERROUS METALS WEAPONS
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Beschreibung
Zusammenfassung:	Provided is a vibration control mass body, as a mass body used for controlling with a high accuracy a vibration associated with high-speed movement of a movable body such as a stage, which is large-sized and to which a complicated shape can be imparted. The vibration control mass body (100) includes a plurality of platy members (10, 20). The plurality of members (10, 20) are respectively made of a tungsten alloy. The tungsten alloy contains, as a chief ingredient, tungsten of greater than or equal to 80 % by mass and less than or equal to 99 % by mass. The vibration control mass body (100) is used in a staging unit having a movable body in order to control a vibration associated with movement of the movable body.