IN SITU OPTICAL SURFACE TEMPERATURE MEASURING

A vacuum processing chamber for measuring the temperature of a surface of an object comprising a cap is provided. The cap has a non-deformable end wall of thermally conducting material and a side wall connected thereto. An outside surface of the end wall is shaped to conform to a shape of the object...

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Bibliographische Detailangaben
Hauptverfasser:	GOTTHOLD, JOHN P, STAPLETON, TERRY M, CHAMPETIER, ROBERT, DANG, HUNG
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS RADIATION PYROMETRY TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	A vacuum processing chamber for measuring the temperature of a surface of an object comprising a cap is provided. The cap has a non-deformable end wall of thermally conducting material and a side wall connected thereto. An outside surface of the end wall is shaped to conform to a shape of the object surface to be measured. A surface on an inside of the end wall of the cap emits electromagnetic radiation having a detectable optical characteristic that is proportional to the temperature of the cap end wall. The vacuum processing chamber further comprises a light wave guide having one end held within the cap a distance from the radiation emitting element and in optical communication therewith.