FLEXIBLE ELECTROSTATIC ACTUATOR

An electrostatic actuator having a base including a first electrode and a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The fl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	DAUSCH, DAVID E, GOODWIN, SCOTT H
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ACTUATING-FLOATS BASIC ELECTRIC ELEMENTS BLASTING CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE COCKS DEVICES FOR VENTING OR AERATING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC SWITCHES ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY EMERGENCY PROTECTIVE DEVICES ENGINEERING ELEMENTS AND UNITS FREQUENCY-CHANGING GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING NATURALLY-OCCURRING ELECTRICITY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS RELAYS SELECTORS SEMICONDUCTOR DEVICES STATIC ELECTRICITY TAPS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	An electrostatic actuator having a base including a first electrode and a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The flexible membrane includes a fixed end connected to the base and a free end opposite the fixed end and spaced apart from the base. The second electrode has at least first and second portions separated by a third portion and in combination defining a first and second step provided in a vicinity of the fixed end.