OPTICAL DISPLACEMENT SENSOR

This invention relates to an optical displacement sensor element, e.g. for u se in a pressure sensor or a microphone, comprising two essentially flat surfac es being separated by a cavity being defined by a spacer, the distance between the surfaces being variable thus providing a displacement sensit...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	FISMEN, BRITTA GRENNBERG, ROGNE, HENRIK, AVSET, BERIT SUNDBY, WANG, DAG, JOHANSEN, IB-RUNE, BERNSTEIN, RALPH W, FERBER, ALAIN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS PUBLIC ADDRESS SYSTEMS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	This invention relates to an optical displacement sensor element, e.g. for u se in a pressure sensor or a microphone, comprising two essentially flat surfac es being separated by a cavity being defined by a spacer, the distance between the surfaces being variable thus providing a displacement sensitive Fabry- Perot interferometer. Both of said surfaces are at least partially reflectiv e, and in that said first surface is provided with at least one optical detecto r, and one of surfaces being provided on an at least partially transparent material.