METHOD AND APPARATUS FOR FORMING POLYCRYSTALLINE PARTICLES

Disclosed herein is a method and apparatus for forming polycrystalline particles by gas phase condensation employing arc plasma evaporation. The disclosed method and apparatus may be employed to form polycrystalline particles from high-melting temperature, low evaporation pressure materials such as...

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Bibliographische Detailangaben
Hauptverfasser: SAPRU, KRISHNA, TAN, ZHAOSHENG
Format: Patent
Sprache:eng ; fre
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Beschreibung
Zusammenfassung:Disclosed herein is a method and apparatus for forming polycrystalline particles by gas phase condensation employing arc plasma evaporation. The disclosed method and apparatus may be employed to form polycrystalline particles from high-melting temperature, low evaporation pressure materials such as transition metals. Arc discharge is sustained by the evaporated species, therefor, there is no need for plasma sustaining gas. Evaporation m ay be sustained from either the cathode or anode. A reaction gas may be provide d to form products with the evaporated species.