METHOD FOR PURIFYING SEMICONDUCTOR GASES

This invention is directed a method for purifying an impure gas to produce an ultra-high purity gas comprising the steps of a) passing the impure liquefied gas through a first absorption means to remove impurities from the liquid phase therein to produce a first purified fluid; b) passing the first...

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Bibliographische Detailangaben
Hauptverfasser:	SALIM, SATERIA, HOLMER, ARTHUR EDWARD, SHREWSBURY, RONALD WILLIAM
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	AMMONIA BASIC ELECTRIC ELEMENTS BLASTING CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMBINED HEATING AND REFRIGERATION SYSTEMS COMPOUNDS THEREOF CYANOGEN ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEAT PUMP SYSTEMS HEATING INORGANIC CHEMISTRY LIGHTING LIQUEFACTION SOLIDIFICATION OF GASES LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS MANUFACTURE OR STORAGE OF ICE MECHANICAL ENGINEERING METALLURGY MIXTURES BY PRESSURE AND COLD TREATMENT NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL REFRIGERATION OR COOLING SEMICONDUCTOR DEVICES SEPARATION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	This invention is directed a method for purifying an impure gas to produce an ultra-high purity gas comprising the steps of a) passing the impure liquefied gas through a first absorption means to remove impurities from the liquid phase therein to produce a first purified fluid; b) passing the first purified fluid through an evaporation means to remove impurities therein to produce a second purified gas; and c) passing the second purified gas through a second absorption means to remove impurities from the vapor phase therein to produce the ultra-high purity gas.