A PHOTOLITHOGRAPHIC PROCESS FOR THE FORMATION OF A ONE-PIECENEEDLE
A method and an apparatus is disclosed for forming a one-piece introduc er needle having a member portion and a needle portion by introducing a photoresist on a substrate. The temperature of the substrate is increased and then decreased. A photomask is deposited onto a substrate.
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng ; fre |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A method and an apparatus is disclosed for forming a one-piece introduc er needle having a member portion and a needle portion by introducing a photoresist on a substrate. The temperature of the substrate is increased and then decreased. A photomask is deposited onto a substrate. |
---|