A PHOTOLITHOGRAPHIC PROCESS FOR THE FORMATION OF A ONE-PIECENEEDLE

A method and an apparatus is disclosed for forming a one-piece introduc er needle having a member portion and a needle portion by introducing a photoresist on a substrate. The temperature of the substrate is increased and then decreased. A photomask is deposited onto a substrate.

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Bibliographische Detailangaben
1. Verfasser: KAFRAWY, ADEL
Format: Patent
Sprache:eng ; fre
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Beschreibung
Zusammenfassung:A method and an apparatus is disclosed for forming a one-piece introduc er needle having a member portion and a needle portion by introducing a photoresist on a substrate. The temperature of the substrate is increased and then decreased. A photomask is deposited onto a substrate.