LAYER PROCESSING

Layer processing to grow a layer structure upon a substrate surface comprise s supplying a vapour mixture stream to the substrate (28) to deposit constituents, monitoring growth with an ellipsometer (12) and using its outp ut in real-time growth control of successive pseudo-layers. A Bayesian algori...

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Bibliographische Detailangaben
Hauptverfasser:	RUSSELL, JOHN, ROBBINS, DAVID JOHN, PICKERING, CHRISTOPHER, MARRS, ALAN DOUGLAS, DANN, ALLISTER WILLIAM ELON, GLASPER, JOHN LEWIS
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CRYSTAL GROWTH ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS METALLURGY PHYSICS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TESTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	Layer processing to grow a layer structure upon a substrate surface comprise s supplying a vapour mixture stream to the substrate (28) to deposit constituents, monitoring growth with an ellipsometer (12) and using its outp ut in real-time growth control of successive pseudo-layers. A Bayesian algorith m is used to predict a probability density function for pseudo-layer growth parameters from initial surface composition, growth conditions and associate d growth probabilities therewith, the function comprising discrete samples. Weights are assigned to the samples representing occurrence likelihoods base d on most recent sensor output. A subset of the samples is chosen with selecti on likelihood weighted in favour of samples with greater weights. The subset provides a subsequent predicted probability density function and associated pseudo-layer growth parameters for growth control, and becomes a predicted probability density function for a further iteration of pseudo-layer growth.