MICRO-OPTIC DEVICE WITH MEANS FOR PRECISELY POSITIONING MICRO-OPTIC COMPONENTS

The invention concerns a device whereby micro-optic parts, particularly those that tend to tilt because of their geometric dimensions, can be precisely arranged on a support. The device according to the invention comprises a support (TR) on which several guide elements (FE1...FE4) are placed in cuto...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HEHMANN, JOERG, SEIBOLD, GERHARD
Format: Patent
Sprache:eng ; fre
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Beschreibung
Zusammenfassung:The invention concerns a device whereby micro-optic parts, particularly those that tend to tilt because of their geometric dimensions, can be precisely arranged on a support. The device according to the invention comprises a support (TR) on which several guide elements (FE1...FE4) are placed in cutouts (A1...A4). The arrangement of the guide elements (FE1...FE4) is such that the micro-optic part (BT) to be positioned can be inserted between the guide element s (FE1...FE4). In this way an active adjustment is not required. In a particularly advantageous embodiment of the invention, the guide elements (FE1...FE4) touch the micro-optic part (BT) at points that are located at different distances from the surface of the support (TR). In this way tilting is prevented in a particularly effective manner. The support (TR) is made of a silicon substrate for example; the guide elements (FE1...FE4) can be uncoated spherical lenses which are placed in cutouts etched into the substrate by means of wet chemical methods.