ANTIREFLECTION COATING FOR A TEMPERATURE SENSITIVE SUBSTRATE
A multilayer antireflection coating (10) for a temperature sensitive substra te (15) such as plastic. One layer is a DC reactively sputtered metal oxide whi ch may be deposited quickly and without imparting a large amount of heat to the substrate. Another layer has a refractive index lower than the...
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Format: | Patent |
Sprache: | eng ; fre |
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Zusammenfassung: | A multilayer antireflection coating (10) for a temperature sensitive substra te (15) such as plastic. One layer is a DC reactively sputtered metal oxide whi ch may be deposited quickly and without imparting a large amount of heat to the substrate. Another layer has a refractive index lower than the substrate. |
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