ANTIREFLECTION COATING FOR A TEMPERATURE SENSITIVE SUBSTRATE

A multilayer antireflection coating (10) for a temperature sensitive substra te (15) such as plastic. One layer is a DC reactively sputtered metal oxide whi ch may be deposited quickly and without imparting a large amount of heat to the substrate. Another layer has a refractive index lower than the...

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Bibliographische Detailangaben
Hauptverfasser: BJORNARD, ERIK J, MEREDITH, WILLIAM A., JR
Format: Patent
Sprache:eng ; fre
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Zusammenfassung:A multilayer antireflection coating (10) for a temperature sensitive substra te (15) such as plastic. One layer is a DC reactively sputtered metal oxide whi ch may be deposited quickly and without imparting a large amount of heat to the substrate. Another layer has a refractive index lower than the substrate.