FLUORINATED POLY(ARYLENE ETHERS)

Fluorinated poly(arylene ethers) having a repeat unit such as (A) are useful as dielectric materials in multilayer interconnects in integrated circuit chips and multichip modules and as protective materials for chips.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SOVISH, RICHARD C, MERCER, FRANK W
Format: Patent
Sprache:eng ; fre
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Fluorinated poly(arylene ethers) having a repeat unit such as (A) are useful as dielectric materials in multilayer interconnects in integrated circuit chips and multichip modules and as protective materials for chips.