DC REACTIVELY SPUTTERED OPTICAL COATINGS INCLUDING NIOBIUM OXIDE

2067765 9204185 PCTABS00011 A multilayer optical coating (10) including at least one layer of niobium oxide (16 and 20) deposited by DC reactive sputtering.

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Bibliographische Detailangaben
Hauptverfasser: DICKEY, ERIC R, STEFFENHAGEN, DEBRA M
Format: Patent
Sprache:eng ; fre
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Zusammenfassung:2067765 9204185 PCTABS00011 A multilayer optical coating (10) including at least one layer of niobium oxide (16 and 20) deposited by DC reactive sputtering.