LAMINATED SILICON OXIDE FILM CAPACITORS AND METHOD FOR THEIR PRODUCTION

A laminated silicon oxide film capacitor comprising a conductive or semiconductive silicon substrate and, formed on the substrate surface, at least one laminated film comprising a silicon oxide layer and an electrode layer laminated one on the other, and electrodes.

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Bibliographische Detailangaben
Hauptverfasser: SAKAI, NAOMICHI, KUBOTA, YOSHITAKA, YAMAMURA, HIROSHI, NAGATA, HIROYA, KIKUSAWA, MASANAGA
Format: Patent
Sprache:eng ; fre
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Beschreibung
Zusammenfassung:A laminated silicon oxide film capacitor comprising a conductive or semiconductive silicon substrate and, formed on the substrate surface, at least one laminated film comprising a silicon oxide layer and an electrode layer laminated one on the other, and electrodes.