LAMINATED SILICON OXIDE FILM CAPACITORS AND METHOD FOR THEIR PRODUCTION
A laminated silicon oxide film capacitor comprising a conductive or semiconductive silicon substrate and, formed on the substrate surface, at least one laminated film comprising a silicon oxide layer and an electrode layer laminated one on the other, and electrodes.
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Format: | Patent |
Sprache: | eng ; fre |
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Zusammenfassung: | A laminated silicon oxide film capacitor comprising a conductive or semiconductive silicon substrate and, formed on the substrate surface, at least one laminated film comprising a silicon oxide layer and an electrode layer laminated one on the other, and electrodes. |
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