GATE VALVE FOR VACUUM PROCESSING APPARATUS

A gate valve for sealing an opening in the wall of a vacuum processing chamber is disclosed. The valve includes a gate having a pair of wheels mounted on opposite ends of the gate and a curved track aligned and shaped to guide the wheels through an angle so that the plane of the gate is rotated out...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MADOCKS, JOHN E, BOOZENNY, ALEX
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ACTUATING-FLOATS APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TAPS THERMAL INSULATION IN GENERAL TRANSPORTING VALVES WEAPONS
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Beschreibung
Zusammenfassung:	A gate valve for sealing an opening in the wall of a vacuum processing chamber is disclosed. The valve includes a gate having a pair of wheels mounted on opposite ends of the gate and a curved track aligned and shaped to guide the wheels through an angle so that the plane of the gate is rotated out of the path of substrates as the gate moves between its sealing and open positions. The curvature of the track should be sufficient to rotate the gate through an angle of at least 60.degree., and preferably 75.degree. to 105.degree., in order to minimize the dimension of the chamber normal to the direction of substrate travel.