SEMICONDUCTOR TRANSDUCER

A semiconductor transducer including a substrate having a well formed in one surface thereof and a semiconductor layer having a first surface bonded to the substrate about the periphery of the well to form a diaphragm and a second surface which is substantially coplanar to the first surface and has...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ALLEN, HENRY V, KNUTTI, JAMES W, PETERSEN, KURT E, KOWALSKI, CARL R
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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