SEMICONDUCTOR TRANSDUCER

A semiconductor transducer including a substrate having a well formed in one surface thereof and a semiconductor layer having a first surface bonded to the substrate about the periphery of the well to form a diaphragm and a second surface which is substantially coplanar to the first surface and has...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ALLEN, HENRY V, KNUTTI, JAMES W, PETERSEN, KURT E, KOWALSKI, CARL R
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A semiconductor transducer including a substrate having a well formed in one surface thereof and a semiconductor layer having a first surface bonded to the substrate about the periphery of the well to form a diaphragm and a second surface which is substantially coplanar to the first surface and has a pedestal projecting therefrom which is disposed above the well. The side walls of the pedestal are substantially orthogonal to the second surface of the semiconductor layer. Means are provided for sensing the deflection of the diaphragm as a function of force applied to the pedestal. Structure preferably extends upward from the bottom of the well to limit the deflection of the diaphragm.