DISPLACEMENT DEVICE, PARTICULARLY FOR THE PHOTOLITHOGRAPHIC TREATMENT OF A SUBSTRATE

PHN l0.503 -9- 4.6.1983 : Displacement device, particularly for the photo-litho-graphic treatment of a substrate. A displacement device, which is particularly suitable for use in an apparatus for the photolithographic treatment of a substrate, is provided with a holder which is placed on a carriage...

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Bibliographische Detailangaben
Hauptverfasser:	BOUWER, ADRIANUS G, WITTEKOEK, STEFAN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONTROLLING DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MATERIALS THEREFOR METAL-WORKING NOT OTHERWISE PROVIDED FOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TRANSPORTING
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Beschreibung
Zusammenfassung:	PHN l0.503 -9- 4.6.1983 : Displacement device, particularly for the photo-litho-graphic treatment of a substrate. A displacement device, which is particularly suitable for use in an apparatus for the photolithographic treatment of a substrate, is provided with a holder which is placed on a carriage mechanism which is acted upon by driving members for imparting translational movements and a rotary movement to the holder. The carriage is constituted by a lower and an upper carriage part, which carriage parts each have a flat surface, these surfaces facing each other. Three linear driving members act upon the carriage, which driving members each have a housing and a driving element which projects at both ends from the housing and which is axially movable with respect to the housing. The housing of the first driving member is connected to the upper carriage part, while the driving elements of the second and the third driving members are coupled to the lower carriage part and the driving elements of the first driving member are connected to the housing of the second and the third driving member, respectively, the driving members being arranged in the shape of an H.