MEMBRANE DEFORMOGRAPHIC DISPLAY, AND METHOD OF MAKING

A MEMBRANE DEFORMOGRAPHIC DISPLAY, AND METHOD OF MAKING A deformographic membrane display system in which a semiconductor substrate, for example silicon, has an insulating layer such as SiO2 formed thereon with an array of holes formed in the insulating layer. Alternatively, the insulating layer may...

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Bibliographische Detailangaben
Hauptverfasser:	LEVINE, JAMES L, HUNG, ROLAND Y
Format:	Patent
Sprache:	eng
Schlagworte:	ADVERTISING BASIC ELECTRIC ELEMENTS CRYPTOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DISPLAY DISPLAYING EDUCATION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING LABELS OR NAME-PLATES NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEALS SEMICONDUCTOR DEVICES SIGNS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	A MEMBRANE DEFORMOGRAPHIC DISPLAY, AND METHOD OF MAKING A deformographic membrane display system in which a semiconductor substrate, for example silicon, has an insulating layer such as SiO2 formed thereon with an array of holes formed in the insulating layer. Alternatively, the insulating layer may be omitted, with the holes being formed in the substrate. A reflective membrane, including a thin metal layer, is formed over the surface in which the holes are formed. Electrodes are formed in the silicon substrate directly beneath or in each of the holes. Control circuitry, which for example, may be formed utilizing metal oxide semiconductor field effect transistor (MOSFET) technology and/or bipolar technology, is formed in the silicon substrate for selectively energizing the electrodes. The portion of the membrane over a given hole is deformed in response to the electrode thereunder being energized by the control circuitry.