TWO-DIRECTIONAL FINE ADJUSTING DEVICE
TWO-DIRECTIONAL FINE ADJUSTING DEVICE The present invention relates to a two-directional fine adjusting device. The device is comprised of a fixed base, a movable plate and first and second piezoelectric members which are fixed to each other and which are expandible and contractible in directions di...
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Format: | Patent |
Sprache: | eng ; fre |
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Zusammenfassung: | TWO-DIRECTIONAL FINE ADJUSTING DEVICE The present invention relates to a two-directional fine adjusting device. The device is comprised of a fixed base, a movable plate and first and second piezoelectric members which are fixed to each other and which are expandible and contractible in directions different from each other. The device includes first and second electrical attraction units for attracting and fastening the respective first and second slide members to the fixed base. Third and fourth slide members are provided with are respectively fixed to two points in the expanding and contracting direction of the second piezoelectric member and which come into slide contact with the movable plate. Third and fourth electrical attraction units are provided for attracting and fastening the respective third and fourth slide members to the movable plate. A generator is provided for applying electrical signals for expansion and contraction to the respective first and second piezoelectric members. A generator is also provided for supplying electric signals for attraction to the first, second, third and fourth electrical attraction units. |
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