Reator de leito fluidizado para a produção de silício de alta pureza

Methods and apparatus for the production of high purity silicon including a fluidized bed reactor with one or more protective layers deposited on an inside surface of the fluidized bed reactor. The protective layer may be resistant to corrosion by fluidizing gases and silicon-bearing gases.

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Bibliographische Detailangaben
Hauptverfasser: JAVIER SAN SEGUNDO SANCHEZ, JOSÉ LUIS MONTESINOS BARONA, MANUEL VICENTE VALES CANLE, PEDRO THOMAS LUJAN GARCIA, MATTHEW S.BETHARDS, EVARISTO AYUSO CONEJERO, XAVIER BENAVIDES REL
Format: Patent
Sprache:por
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Zusammenfassung:Methods and apparatus for the production of high purity silicon including a fluidized bed reactor with one or more protective layers deposited on an inside surface of the fluidized bed reactor. The protective layer may be resistant to corrosion by fluidizing gases and silicon-bearing gases.