PROCESSO PARA A FABRICACAO DE CONDENSADORES ELETRICOS DE PLASMAPOLIMEROS,DE CAMADAS MULTIPLAS

PROCESSO PARA A FABRICACAO DE CONDENSADORES ELETRICOS DE PLASMAPOLIMEROS,DE CAMADAS MULTIPLAS

A method for the manufacture of electrical plasma-polymer multilayer capacitors wherein alternate layers of thin metal conductors and dielectric layers produced by radiation polymerization are deposited on a substrate, after which the portions of the metal layers to which electrical contact is to be...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: REINHARD BEHN, RUDOLF WITTMANN
Format: Patent
Sprache:por
Schlagworte:
BASIC ELECTRIC ELEMENTS
CAPACITORS
CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
ELECTRICITY
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Beschreibung
Zusammenfassung:A method for the manufacture of electrical plasma-polymer multilayer capacitors wherein alternate layers of thin metal conductors and dielectric layers produced by radiation polymerization are deposited on a substrate, after which the portions of the metal layers to which electrical contact is to be made are etched, preferably by sputter etching, to remove oxides therefrom. Then, contact layers are applied to the opposite end faces of the substrate to provide electrical connections for the portions of the metal layers which have been etched, the contact layers consisting of the sequence (1) an aluminum layer, (2) a nickel layer, and (3) a palladium layer.