SISTEMA AUTOMATICO DE AQUECIMENTO PARA A PRODUCAO DE SILICIO SEMICONDUTOR

Bibliographische Detailangaben

Hauptverfasser:	FILHO MAURICIO CAMPOS DE, CARVALHO JOSE WILSON CAMILHER, GREGOLIN JOSE ANGELO RODRIGUES
Format:	Patent
Sprache:	por
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING
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