INDICADOR CAPACITIVO DE PRESSAO

The transducer comprises a profile- etched metallic diaphragm (7) the peripheral zone (6) of which is left unetched for mounting the diaphragm on an Al2O3 base plate (1) in an air-tight and pressure-tight manner; and a thin metallic film (2) applied to the adjacent surface of the base plate, the dia...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	PITEIRA F, BURKEL R
Format:	Patent
Sprache:	por
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	The transducer comprises a profile- etched metallic diaphragm (7) the peripheral zone (6) of which is left unetched for mounting the diaphragm on an Al2O3 base plate (1) in an air-tight and pressure-tight manner; and a thin metallic film (2) applied to the adjacent surface of the base plate, the diaphragm (7) and the metallic film (2) constituting a capacitor which varies with the separation between the diaphragm and the metallic film and hence with ambient pressure. The capacitor determines the frequency of an oscillator 13.