A METHOD FOR RECEIVING BORON NITRIDE NANOLAYERS (BNx)

Изобретението се отнася до метод на получаване на нанослоеве от ВN, намиращи приложение като алтернативен диелектрик в прибори на базата на SiС и като подслой за епитаксиално израстване на GаN, поради съответствие на параметрите на решетката и като износо- и корозионноустойчив материал. Съгласно изо...

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Hauptverfasser:	SUEVA DOCHKA, KRUSTEV VESELIN, GEORGIEVA VELICHKA, MANOLOV EMIL, NEDEV NIKOLA, GEORGIEV STEFAN, IVANOV TSVETAN, BESHKOV GEORGI, SPASOV DENCHO, VELCHEV NIKOLAY
Format:	Patent
Sprache:	bul ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY MANUFACTURE OR TREATMENT THEREOF METALLURGY NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS NANOTECHNOLOGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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