Method of providing a smooth surface on a substrate

A process for polishing a workpiece. The process comprises the steps of: (a) placing a structured abrasive article bearing precisely shaped abrasive composites on at least one major surface thereof in contact with a surface of a workpiece having a surface having a scratch pattern having an initial R...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RICHARD M. OLSON, MICHAEL V MUCCI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A process for polishing a workpiece. The process comprises the steps of: (a) placing a structured abrasive article bearing precisely shaped abrasive composites on at least one major surface thereof in contact with a surface of a workpiece having a surface having a scratch pattern having an initial Ra value thereon such that said composite bearing surface is in contact with said workpiece surface; (b) moving at least one of said workpiece or said structured abrasive article relative to the other in a first abrading direction, while simultaneously moving at least one of said workpiece or said structured abrasive article relative to the other in a second abrading direction not parallel to said first abrading direction such that said second abrading direction crosses said first abrading direction while contact is maintained between said composite bearing surface and said workpiece surface, whereby said initial Ra value is reduced. Typically, the surface of the workpiece is characterized by a scratch pattern having an initial Ra preferably less than about 120 micrometers, more preferably less than about 90 micrometers, most preferably less than about 20 micrometers.