Silicon moulded parts with electronic surface passivation that is stable over time

The invention relates to silicon moulded parts with a passivating surface coating. Said coating is a sol-gel material and is applied using wet-chemical methods.

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Bibliographische Detailangaben
Hauptverfasser: CHRISTIAN HASSLER, HARALD KRAUS, MICHAEL MAGER
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:The invention relates to silicon moulded parts with a passivating surface coating. Said coating is a sol-gel material and is applied using wet-chemical methods.