Silicon moulded parts with electronic surface passivation that is stable over time
The invention relates to silicon moulded parts with a passivating surface coating. Said coating is a sol-gel material and is applied using wet-chemical methods.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The invention relates to silicon moulded parts with a passivating surface coating. Said coating is a sol-gel material and is applied using wet-chemical methods. |
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