Microscopic scale forming method by selective etching of a doped substrate

Bibliographische Detailangaben

Hauptverfasser:	MARK LIZZA, THOMAS A. PUMO, WILLIAM S. TRIMMER, GLENN J. FRICANO
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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