Systems and methods for measuring trace contaminants in gas matrix using integrated cavity output spectroscopy

Systems and methods for measuring trace contaminants in gas matrix using integrated cavity output spectroscopy

SYSTEMS AND METHODS FOR MEASURING TRACE CONTAMINANTS IN GAS MATRIX USING INTEGRATED CAVITY OUTPUT SPECTROSCOPY A laser absorption spectrometry system for gas measurement is provided. The system includes an integrated cavity output spectroscopy (ICOS) assembly including a gas cell. The gas cell inclu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEEN, John Brian, LANHER, Bertrand Simon, TANGUAY, François
Format: Patent
Sprache:eng
Schlagworte:
COLORIMETRY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Beschreibung
Zusammenfassung:SYSTEMS AND METHODS FOR MEASURING TRACE CONTAMINANTS IN GAS MATRIX USING INTEGRATED CAVITY OUTPUT SPECTROSCOPY A laser absorption spectrometry system for gas measurement is provided. The system includes an integrated cavity output spectroscopy (ICOS) assembly including a gas cell. The gas cell includes a cell body defining an optical cavity and an input mirror and an output mirror positioned in the optical cavity. The assembly further includes a tunable diode laser configured to emit laser light, a collimator positioned in an optical path between the tunable diode laser and the gas cell, and a detector arranged to measure laser light exiting the optical cavity. The collimator includes at least one of a reflective collimation mirror or a gradient index (GRN) lens. FC-) .c E~ woo Ca, E tCU a 0=0 Cc E c co -5 : -5 ca a 0 U U))7c r-L.-a) CL0 =(U