System, Fluidics Cartridge, And Methods For Using Actuated Surface-Attached Posts For Processing Cells

Abstract This technique suppresses the anisotropy in the physical properties of an object to be scanned by an ion beam in FIB machining. This device machining method uses an ion beam to form a structure body. The device machining method comprises the step of forming the structure body while changing...

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Bibliographische Detailangaben
Hauptverfasser: Fisher, Jay Kenneth, Spero, Richard Chasen, Superfine, Richard
Format: Patent
Sprache:eng
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Zusammenfassung:Abstract This technique suppresses the anisotropy in the physical properties of an object to be scanned by an ion beam in FIB machining. This device machining method uses an ion beam to form a structure body. The device machining method comprises the step of forming the structure body while changing the position of the irradiation by the ion beam. In this step of forming the structure body, each region of the structure body is formed through a plurality of exposures using the same type of ion beam.