SENSOR HAVING CONTOURED MEMBRANE

A sensor is provided and includes a substrate, a patterned electrode, and a membrane material. The patterned electrode is deposited on the substrate and has a conductive surface. The membrane material is deposited on the conductive surface of the patterned electrode and not on the planar substrate....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DERVISEVIC, Esma, RANAMUKHAARACHCHI, Sahan, CADARSO BUSTO, Victor Javier, OLENGINSKI, Allison
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A sensor is provided and includes a substrate, a patterned electrode, and a membrane material. The patterned electrode is deposited on the substrate and has a conductive surface. The membrane material is deposited on the conductive surface of the patterned electrode and not on the planar substrate. The membrane material forms a three-dimensional membrane layer that covers the conductive surface of the patterned electrode.