The use of surface patterning for fabricating a single die direct capture dental X-ray imaging sensor
The present invention is generally directed to a device in which an integrated charge storage, amplification, and readout circuit serves as depositional substrate with an irregular surface while a polycrystalline photoactive material is deposited as a single continuous depositional layer on top of t...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The present invention is generally directed to a device in which an integrated charge storage, amplification, and readout circuit serves as depositional substrate with an irregular surface while a polycrystalline photoactive material is deposited as a single continuous depositional layer on top of the integrated charge storage, amplification, and readout circuit and the polycrystalline photoactive material is comprised of a ll-VI semiconductor compound or alloys of ll-VI compounds. The present invention is also generally directed to a sensor useful for detecting X-ray photons having a silicon-based single die, charge storage, amplification, and readout pixel array integrated circuit serving as a depositional substrate with an irregular surface with a polycrystalline photoactive material deposited as a single continuous depositional layer on top of the integrated charge storage, amplification, and readout circuit. |
---|