The use of surface patterning for fabricating a single die direct capture dental X-ray imaging sensor

The present invention is generally directed to a device in which an integrated charge storage, amplification, and readout circuit serves as depositional substrate with an irregular surface while a polycrystalline photoactive material is deposited as a single continuous depositional layer on top of t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YOON, Douglas C, STAFSUDD, Oscar Magnus
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention is generally directed to a device in which an integrated charge storage, amplification, and readout circuit serves as depositional substrate with an irregular surface while a polycrystalline photoactive material is deposited as a single continuous depositional layer on top of the integrated charge storage, amplification, and readout circuit and the polycrystalline photoactive material is comprised of a ll-VI semiconductor compound or alloys of ll-VI compounds. The present invention is also generally directed to a sensor useful for detecting X-ray photons having a silicon-based single die, charge storage, amplification, and readout pixel array integrated circuit serving as a depositional substrate with an irregular surface with a polycrystalline photoactive material deposited as a single continuous depositional layer on top of the integrated charge storage, amplification, and readout circuit.