Filter cleaning device, filter system, and filter cleaning method

Provided is a filter cleaning device with which it is possible to clean a filter while limiting a reduction in the service life of the filter. This invention provides a filter cleaning device which determines a contaminated area from among a plurality of areas in a filter for capturing a particle or...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TABATA, Seiichiro, VAN DEN BERG, Jan Jasper, BEARD, Tim
Format: Patent
Sprache:eng
Schlagworte:
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