Filter cleaning device, filter system, and filter cleaning method
Provided is a filter cleaning device with which it is possible to clean a filter while limiting a reduction in the service life of the filter. This invention provides a filter cleaning device which determines a contaminated area from among a plurality of areas in a filter for capturing a particle or...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Provided is a filter cleaning device with which it is possible to clean a filter while limiting a reduction in the service life of the filter. This invention provides a filter cleaning device which determines a contaminated area from among a plurality of areas in a filter for capturing a particle or molecule, and supplies energy for reducing the contamination level to the portion of the plurality of the areas that is determined as the contaminated area. According to this invention, it is possible to provide a filter cleaning device with which it possible to clean a filter while limiting a reduction in the service life of the filter. |
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